{"id":872,"date":"2024-05-22T07:54:00","date_gmt":"2024-05-22T07:54:00","guid":{"rendered":"https:\/\/net4air.eu\/home\/?p=872"},"modified":"2026-07-08T07:55:03","modified_gmt":"2026-07-08T07:55:03","slug":"piezoelectric-mems-energy-harvester-for-low-power-applications","status":"publish","type":"post","link":"https:\/\/net4air.eu\/home\/piezoelectric-mems-energy-harvester-for-low-power-applications\/","title":{"rendered":"Piezoelectric MEMS Energy Harvester for Low-Power Applications"},"content":{"rendered":"\n<p class=\"justify-text has-link-color wp-elements-9ed786c7ec160e641ef65dc7bc01d6b7 wp-block-paragraph\">Muscalu, G., Firtat, B., Anghelescu, A., Moldovan, C. A., Dinulescu, S., Brasoveanu, C., Ekwinska, M., Szmigiel, D., Zaborowski, M., Zajac, J., Stan, I., &amp; Tulbure, A. (2024).  <br>Electronics, 13(11), 2087. <br><a href=\"https:\/\/doi.org\/10.3390\/electronics13112087\">https:\/\/doi.org\/10.3390\/electronics13112087<\/a><\/p>\n\n\n\n<p class=\"justify-text wp-block-paragraph\">With the global market value of sensors on the rise, this paper focuses on the fabrication and testing of a proof-of-concept piezoelectric energy harvester which is able to harvest mechanical energy from the ambient environment and convert it into electrical energy in order to power wireless sensor networks. We focused on obtaining a new device structure based on a comb-type array of piezoelectric MEMS cantilevers (2 \u00d7 10) for a resonant frequency in the environmental application domain (a few hundred Hz) and a chip area of only 1 cm<sup>2<\/sup>. The configuration of the lead-free piezoelectric cantilever consists of a Si substrate, a pair of Ti-Pt electrodes and a sputtered piezoelectric layer of 12% Sc-doped AlN with a thickness of 1000 nm, a dielectric constant of ~13 and e<sub>31,f<\/sub>\u00a0= 1.3 C\/m<sup>2<\/sup>. At a resonant frequency of 465.2 Hz and an acceleration of 1 g, the maximum value for the collected power was 2.53 \u00b5W for an optimal load resistance of 1 M\u03a9 resulting in a power density of 60.2 nW\/mm<sup>3<\/sup>\u00a0for the unpacked device, without taking into account the vibration volume. By increasing the excitation acceleration to 2 g RMS and using LTC3588-1 for the power circuitry we were able to obtain a stabilized output voltage of 1.8 V.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Muscalu, G., Firtat, B., Anghelescu, A., Moldovan, C. A., Dinulescu, S., Brasoveanu, C., Ekwinska, M., Szmigiel, D., Zaborowski, M., Zajac, J., Stan, I., &amp; Tulbure, A. (2024). Electronics, 13(11), 2087. https:\/\/doi.org\/10.3390\/electronics13112087 With the global market value of sensors on the rise, this paper focuses on the fabrication and testing of a proof-of-concept piezoelectric energy harvester [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[8],"tags":[],"class_list":["post-872","post","type-post","status-publish","format-standard","hentry","category-publications"],"_links":{"self":[{"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/posts\/872","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/comments?post=872"}],"version-history":[{"count":1,"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/posts\/872\/revisions"}],"predecessor-version":[{"id":873,"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/posts\/872\/revisions\/873"}],"wp:attachment":[{"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/media?parent=872"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/categories?post=872"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/net4air.eu\/home\/wp-json\/wp\/v2\/tags?post=872"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}